High Spatial Resolution and Wide Range EDS Analysis with FE-SEM
نویسندگان
چکیده
منابع مشابه
Ultra High Solid Angle EDS System Advanced STEM Analysis for FE-SEM
EDS (Energy dispersive X-ray spectrometry) is a technique used for elemental analysis of a sample, through detection of characteristic X-rays generated from a sample impacted by an electron beam. STEM (Scanning Transmission Electron Microscopy) is a method to obtain high spatial resolution images with Z-contrast [1]. STEM-in-SEM has recently become a technique of choice for high spatial resolut...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2017
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927617001027